| Titel | Rolle | Status | Datum | Hersteller | Zuschlagswert |
|---|---|---|---|---|---|
| Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes | Gewinner | awarded | 27.03.2026 | - | - |
| Thermal oxidation system for the production of wet- and dry-oxides | Gewinner | awarded | 25.03.2026 | - | - |